Quartz crystal related vacuum equipment is one of the main products of Showa Shinku.
The term “quartz” here refers to electronic components such as crystal units, crystal oscillators, SAW filters, and other quartz devices that use quartz, a single-crystal piezoelectric element, as a substrate.
Quartz devices have an extremely stable oscillation frequency and are indispensable to all products in our lives. They are used in a wide range of applications, and are used in almost all of the electrical products around us, including smartphones, computers, watches and clocks, automobiles and home video game consoles.
Quartz devices, due to their characteristics, require extremely high precision, and Showa Shinku manufactures and sells vacuum equipment suitable for each step of the quartz device production line.
1.Employing In-line type for three rooms
Separating the processing room and unloading room, as well as mounting an ion source to H/L process respectively, has enabled the operation to be efficient with idling time minimized.
2.Simultaneous processing of multiple sources
SFE-X2012 is equipped with two sets of IGC-201 type 100mm beam ion sources which were installed in SFE-B03.
The equipment can process maximum 24 pieces per set and accordingly 48 pieces in total at a time.
3.High accuracy mechanism supporting very small works
We have employed the transfer mechanism having high accuracy, high stability and high reproducibility, which were field-proven on SFE-B03.
You can mass-produce small-sized works (2.0 × 1.6, 1.6 × 1.2) with stable frequency adjustment, which has been difficult when using the conventional in-line system.
You can dismantle each device unit-by-unit based on the design considering maintainability.
1.Uniformity: Inside trays ±1.2%, Between trays ±1.5%
2.External: W1200 × D2500 × H1440 mm, Same footprint, Lower height
3.Target-use efficiency largely improved to 44% by improving a cathode.
4.”Rack & Pinion” system enables accurate conveyance.
Troubleshooting menu on a display for an alarm
Recipe setting for each tray
Up to ten layers of films coated per tray
1.Compact, Highly precise, Low price
Cycle Time is less than 0.4 s/pcs.
(SMD 3.2 × 2.5, 24 MHz, H1000 ppm/s, L50 ppm/s)
2.New Ion source (Beam width domain: 100mm) is equipped in.From 24 to 32 works can be made at the same time.
3.Micro works (less than 2.0 × 1.6 size) are produced stably by highly precise conveyance mechanism.
4.Automatic calculation mode of load capacity is equipped in.
5.Improved maintenability of ion source and contact mechanism.
6.Adopting two chambers and Load-lock type conveyer system always maintains a vacuum in the working room and the tact time does not depend on vacuum pumping time and vent time.
7.Consecutive operation driving is enabled when connected to optional Loader / Un-loader (include an overdrive function).
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